Micro-Electrical-Mechanical Systems
Synonyms
BioMEMS
MEMS
Micro Electrical Mechanical Systems
Micro Electro Mechanical Systems
Micro-Electrical-Mechanical System
Micro-Electro-Mechanical System
Micro-Electro-Mechanical Systems
System, Micro-Electrical-Mechanical
System, Micro-Electro-Mechanical
Systems, Micro-Electrical-Mechanical
Systems, Micro-Electro-Mechanical
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.